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德國Aurion Anlagentechnik GmbH 
Aurion 公司生產(chǎn)、銷售使用等離子體處理技術(shù)和無線射頻元件進(jìn)行表面處理和表面涂層的設(shè)備。
使用的等離子技術(shù)包括：
● RIE ( 活性離子蝕刻）清潔和活化技術(shù)；微波下游的等離子技術(shù)
● PVD ( 物理蒸汽沉積，擴(kuò)散) 涂層技術(shù)；PECVD ( 等離子體增強化學(xué)蒸氣沉積) 技術(shù)
● 大氣等離子活化技術(shù)
除了成套的系統(tǒng)與元件外，Aurion 公司還可以在等離子與無線電頻率技術(shù)方面提供專業(yè)咨詢服務(wù)，并進(jìn)行人員培訓(xùn)。
在提供標(biāo)準(zhǔn)表面處理系統(tǒng)的同時，Aurion 還為有特殊要求的客戶提供定制服務(wù)，例如：根據(jù)客戶特殊需求提供整套解決方案。
Aurion 的等離子系統(tǒng)目前應(yīng)用于以下行業(yè)：
● 半導(dǎo)體
● 醫(yī)藥技術(shù)
● 光學(xué)
● 汽車行業(yè)
Aurion delivers systems for treatment and coating of surfaces by means of plasma processes
as well as radio frequency components.
Plasma technologies employed are:
● Cleaning and activation with RIE (Reactive Ion Etching) and Microwave
downstream plasma
● Coating with PVD (Physical Vapour Deposition, Sputtering) and PECVD (Plasma
Enhanced Chemical Vapour Deposition)
● Activation with atmospheric plasma
Apart from systems and components Aurion offers its expertise in the area of plasma and radio
frequency technology for consulting services and training.
While providing a series of standard systems for surface treatment, Aurion also develops and
builds custom made systems, i.e. solutions which are tailored to the specific requirements of
the customer.
Aurion?s plasma systems are used in the following industrial areas:
● Semiconductor
● Medical technology
● Optics
● Automotive