德國Nanoplus
Nanoplus GmbH 公司于1998年自Würzburg 大學技術物理系脫離而創建。其主要活動是將研究結果應用于實際程序與產品內,其專門從事光電子學儀器與客戶指定的微-毫微結構塑造。目前在nanoplus內有15名員工。該公司裝備有一條完整的處理線用于半導體激光制造,其包括不同的干式蝕刻系統、噴濺系統、脫水器、掩模對準器、激光裝備工具等等,均處于250 m2 的絕對無塵室設備中(級別100-10000)。該公司還具有12 m2 的實驗室空間以用于技術支持(高純度氣體與水的制備)。?
Nanoplus的主產品是與返回激光偶合的復合體,它是通過nanoplus自己的獨特技術制造的。通過此項技術實現的DFB激光具有高單獨模式產出,高效率,以及高側模式抑制率(>40dB),其與低背射敏感度與端口接合。近些年所開發的該技術不要求過度生長,即可應用與各種半導體,包括基于GaSb、InP與GaAs 的材料。基于這些材料系統,nanoplus制造波長范圍為0.7到2.5μm的DFB與Fabry-Perot 激光二極管,應用于傳感技術與分光鏡技術。
此外,nanoplus制造波長范圍為5到12μm 的量子級串聯激光。
Nanoplus was founded in 1998 as a spin-off from the department of Technical Physics at Würzburg University to transfer research results into applications and products with a specialization in optoelectronics devices and customer specific micro- and nano-structuring.
The company is equipped with a complete process line for semiconductor laser fabrication, comprising different dry etch systems, sputter systems, evaporators, mask aligners, laser mounting facilities, etc. in a 250 m2 clean room (class 100-10000). Nanoplus facilities also comprise 120 m2 of laboratory space for technical supply (a/c, high purity gases, water preparation) and 500 m2 of office and characterization space.
A key product of nanoplus are distributed feedback (DFB) laser diodes based on a unique and patented technology. DFB lasers realized by this technique have a high single mode yield, high efficiencies as well as high sidemode supression ratio (SMSR) around 40dB combined with low back reflection sensitivity and thresholds. The technology has been optimized for a wide variety of semiconductor heterostructures including GaSb, InP and GaAs based materials. Based on these material systems, nanoplus produces DFB and Fabry-Perot laser diodes in the wavelength range from 0.7 up to 2.8 μm for sensing and spectroscopy as well as telecom applications.