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美國Nano-Master
美國NANOMASTER公司提供高性能反應離子刻蝕系統，能夠滿足多種金屬和非金屬刻蝕的需要。該系統可以選用RF、空陰極等離子體、感應耦合等離子體（ICP）和微波等離子體源來滿足不同材料刻蝕的需要。
Nano-Master, USA was founded in 1992 as a wholly-owned subsidiary of Nano-Master, S.A., France, a leading metrology company in defect inspection and high speed overlay measurement. Subsequent to the closing down of Nano-Master S.A. in 1993, Dr. Birol Kuyel took over the ownership of Nano-Master, USA. Later, the name was changed to Nano-Master, Inc., which has now become a 100% privately owned US company.

Nano-Master, Inc. manufactures a complete line of sputtering systems with reactive sputtering, co-sputtering and combinatorial sputtering, PECVD tools, RIE and Deep RIE systems along with thermal and e-beam evaporators, and single wafer megasonic cleaners.

Over the past years,Nano-Master has developed strategic partnership with leading technology companies throughout the world to distribute and market their products in the United States. Nano-Master serves a broad range of industries and markets including semiconductor manufacturing; chemical processing (SURPASS ultra-pure chemical handling componenents, TYK optical leak and level sensors, SIE capacitive sensors), and plasma processing components (Plasma Consult hollow cathode, microwave plasma sources, Langmuir probes, and SHEN-CHANG pulsed DC power controllers). With such a diverse range of products, especially in the semiconductor, MEMS and FPD markets, NANO-MASTER has close contacts with many end user manufacturing facilities, R&D and OEM suppliers throughout the USA.

Dr. Birol Kuyel is the President and CEO of Nano-Master, Inc. His background spans a broad range of technology, including High Temperature Plasma Physics, Turbulence, Si3N4 Film Deposition and Characterization, X-Ray Source Development, DUV Source Development, DUV Step and Scan Lithography Tool Development (SEMATECH) and the Lithography Cost of Ownership Model (SEMATECH). He has been awarded 9 patents, and published numerous papers.

Nano-Master employs highly skilled and educated design and manufacturing engineers, service engineers, application engineers, and support personnel. Nano-Master employs a number of engineers with MEE, MCE, MME, and skilled technicians with many years of experience in the industry.

Nano-Master's objective is to provide top-level, quality services while maintaining the highest levels of integrity at all times.

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