AFMinSEM 德*** Nano analytik(ParcanNano)針尖電子束光刻與掃描電子顯微鏡組合系統

簡介:
公司以全球獨***的針尖技術為核心競爭力,技術源自于德***伊爾默瑙工業大學,致力于主動式針尖技術在微納米結構制備和表征方面的研發,及其相關設備的產業化。
公司開發的針尖技術模塊為滿足高精度成像而空間受限的應用需求而設計,既可以在大氣環境下實現樣品快速表征,也可以集成在真空環境中,如集成在掃描電子顯微鏡(SEM)中。無需對SEM腔室進行任何改造,保留SEM原有功能,賦予嶄新的應用領域,例如進行原位形貌表征、微操作和針尖誘導沉積。
技術特點:
。 不影響掃描電鏡自身功能
。4mm電鏡工作距離確保高分辨
。 原子力、電子束及離子束功能聯用
。 標準數據法蘭接口,方便安裝
。 大氣、真空環境操作
。 體積小,重量輕,靈活
。 樣品可掃范圍大 20 x 20 mm
。 自激發自傳感智能針尖規
功能指標:
.png)
.png)
.png)
.png)
Brief introduction:
The company takes the world's exclusive patented tip technology as its core competitiveness. The technology is derived from the technical university of ilmenau, Germany, and is committed to the research and development of active tip technology in the preparation and characterization of micro and nano structures, as well as the industrialization of related equipment.
The pinhead technology module developed by the company is designed to meet the application requirements of high-precision imaging with limited space. It can not only realize rapid sample characterization in atmospheric environment, but also be integrated in vacuum environment, such as scanning electron microscope (SEM).No modification of SEM chamber is required, and the original functions of SEM are retained, and new application fields are endowed, such as in-situ morphology characterization, micromanipulation and needle-induced deposition.
Technical features:
.The function of sem itself was not affected
.The working distance of 4mm electron microscope ensures high resolution
.Functional combination of atomic force, electron beam and ion beam
.Standard data flange interface for easy installation
.Operating in atmosphere and vacuum
.Small size, light weight, flexible
.The sweep range of the sample is 20 x 20 mm
.Self-excitation and self-sensing intelligent needle gauge