The nB4 is a generation ahead of the current competition ａnd with its field-proven performance has gained acceptance in the market place. It has excellent stability ａnd has demonstrated an average uptime of greater than 93%. NanoBeam now introduces the nB5 which has been developed to further reduce delivery times ａnd service costs.
NB5 development aims:
Refine design ａnd components to reduce routine service requirements.
Achieve a machine-fault-downtime of less than 5% annually.
Enhance performance
Facilitate volume production.
Specification:
Beam Voltage range 20kV - 100kV
Feature size on resist <8nm
Stitching/overlay error <25nm for 500um field
Automatic loading 5 chuck airlock system
The nB5 system will provide a platform for further development to high deflection speed ａnd further integrated electronics.
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