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FMA-2622A-I_FMA-2622A-I2_FMA-2622A-V2_FMA-2622A-VOL質量流量控制器OMEGA

20多種氣體校準，包括氦氣、氧氣、氖氣、***氧化二氮、氮氣、大氣、氬氣、***氧化碳、二氧化碳、甲烷、乙烷、氫氣、丙烷、丁烷、異丁烷、乙烯、乙炔、氪氣、氙氣、六氟化硫

同時顯示壓力、溫度、體積以及質量流量

簡單易用的按鈕界面

NIST 可溯源性標準

滿量程范圍：0.5 SCCM ~ 3000 LPM

常規響應時間：50 ~ 100 毫秒

常規量程比：100:1

位置不敏感

±0.8%讀數精度

標配RS232

FMA-2622A-I_FMA-2622A-I2_FMA-2622A-V2_FMA-2622A-VOL質量流量控制器OMEGA

Accuracy: (+0.8% of readings + 0.2% of full range)

Repeatability: Full range (+0.2%)

Range ratio: 100:1

Control response time: 100 ms

Input control signal: 0 ~ 5 Vdc, RS232

Output signal: 0 ~ 5 Vdc, RS232

Optional Input/Output: 4-20 mA, 0-10 Vdc

Working temperature: 10 ~ 50 degree C (14 ~ 50.00 degree C)

Zero offset: 0.02%/~C of full range

Range migration: 0.02%/C of full range

Humidity range: 0 - 100% RH, no condensation

Additional velocity: 2.4% of full range

Contact material: 303 and 302 stainless steel, fluororubber, silicone RTV (rubber), glass reinforced nylon, aluminium, copper, 410 stainless steel, silicone, glass; > 250 SLM: 416 stainless steel and nickel replacement copper

Maximum pressure

Mass Flow Controller: 145 psig

Use Volume Model: Use Volume Model: Near the Atmosphere, recommended a maximum of 15 psig.

Volume flowmeters and controllers do not guarantee the accuracy of mass flow rate beyond the rated flow range of flowmeters. These values are only applicable to near-atmospheric pressure conditions. The recommended maximum working pressure is 15 psig

Rating minimum differential pressure: 5 SLM and below: 5 psid; 10-250 SLM: 15 psid; 500 SLM: 5 psid; 1500 SLM: 10 PSID

Power supply current: 20 SLM and below 0.250 A; 50 SLM and above 0.75 A (conventional)

Power supply voltage: 20 SLM and smaller equipment 12-30 Vdc; 50 SLM and larger equipment 24-30 Vdc

Electrical connection: 8 pins circular Mini DIN

FMA-2622A-I_FMA-2622A-I2_FMA-2622A-V2_FMA-2622A-VOL質量流量控制器OMEGA

FMA-2600A系列質量與體積流量控制器在層流場中使用差壓原則來確定和控制質量流速。流量計中的層流元件(LFE)迫使氣體進入層流。泊肅葉方程規定， 在這***區域體積流速與壓力下降呈線性關系。使用壓差傳感器衡量LFE固定距離中的壓力下降情況。同時結合氣體的粘度準確判定體積流速。引入單獨的絕對溫度和壓力傳感器，并根據***系列標準條件糾正氣體流速。這種標準流速俗稱質量流速，并使用每分鐘標準立方英尺(SCFM)或每分鐘標準升(SLM)等單位表示。

該控制器采用連接到流體的真正比例閥，通過***體化PID回路控制器控制流體。標準設備包括0 ~ 5 V輸出（可選4 ~ 20 mA）和RS232通訊?？赏ㄟ^前面板鍵盤或RS232通訊調整氣體選擇功能和設定值。體積 流量、質量流量、絕對壓力以及溫度均可以通過RS232連接查看或記錄。同時，在距離為46 m (150')的同***串口連接上，***多可與26臺設備進行多點通訊。