Aera FC-780CHT高溫金屬密封蒸汽質(zhì)量流量控制器
Aera? FC-780CHT MFCs withstand high temperatures and prevent condensation in applications that require the heating of a liquid source to generate sufficient vapor pressure for MFC flow control.
Configured with the printed circuit board in a separate module that is not subjected to elevated heat, FC-780CHT MFCs are able to withstand the effects of bake-out at high temperatures.
Aera FC-780CHT系列質(zhì)量流量控制器能經(jīng)受高溫,在液體加熱產(chǎn)生大量蒸汽的環(huán)境質(zhì)量流量控制時(shí)可以防止冷凝收縮。
隔離的模塊線路設(shè)計(jì)使得控制器不受高溫影響,F(xiàn)C-780CHT能夠有效抵抗烘烤環(huán)境時(shí)的高溫影響。
流量范圍:10sccm-5slm
Benefits:
High reliability
Long-term zero drift stability
優(yōu)點(diǎn):
高可靠性
長(zhǎng)期零點(diǎn)漂移的穩(wěn)定性
Features:
Rugged, high-temperature design
Metal seals
Solenoid control valves
80°C(176°F) max temp for MFC base
50°C(122°F) max temp for remote electronic controller
特點(diǎn):
牢固,高溫設(shè)計(jì)
金屬密封
電磁控制閥
本體***高支持溫度80°C(176°F)
遠(yuǎn)程控制器***高支持溫度50°C(122°F)